Brooks analog mass flow meters and mass flow controllers are designed to meet the rigorous demands of established and newly developing process applications. They have proven to be very stable over time. These devices continue to add to their expansive installed base due to their good response, accuracy, and simple integration.
Brooks Instrument Thermal Mass Flow 5850E
Brooks Instrument Thermal Mass Flow 5851E
Additional 5800 Series Models:
| Model | Type | Full Scale Capacity |
| 5850EM | Controller – Metal Seals | 3 – 30,000 sccm |
| 5851EM | Controller – Metal Seals | 10 – 100 slpm |
| 5853E | Controller – Elastomer Seals | 100 – 1,000 slpm |
| 5860E | Meter – Elastomer Seals | 3 – 30,000 sccm |
| 5861E | Meter – Elastomer Seals | 10 – 100 slpm |
| 5863E | Meter – Elastomer Seals | 100 – 1,000 slpm |
| 5850i | Controller – Elastomer Seals | 3 – 30,000 sccm |
| 5851i | Controller – Elastomer Seals | 10 – 100 slpm |
| 5853i | Controller – Elastomer Seals | 100 – 1,000 slpm |
| 5860i | Meter – Elastomer Seals | 3 – 30,000 sccm |
| 5861i | Meter – Elastomer Seals | 10 – 100 slpm |
| 5863i | Meter – Elastomer Seals | 100 – 1,000 slpm |
