Brooks Instrument Thermal Mass Flow 5851E

Call 800-876-2826 for current pricing.

Analog Thermal Mass Flow Controller, 10 – 100 slpm, Elastomer Seals

The Brooks Model 5851E elastomer sealed analog mass flow controller accurately measures and controls gas flows of 10 – 100 slpm (Nitrogen). Brooks’ extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.


Max Pressure Max Temp
Type Full Scale Capacity Accuracy bar psi C F Output
Elastomer Seal Meter / Controller 10 – 100 slpm 1% FS 100 1500 65 150 0-5 Vdc