Digital, Metal-Sealed Thermal Mass Flow Meter/Controller, 1-1/8” Platform, UHP
Brooks Model SLA7900 Series UHP digital thermal mass flow measurement and control products offer unparalleled flexibility and performance, and are designed to meet the latest 1-1/8” platform. The SL7900 Series combines superior accuracy of the TruCal process gas calibration system with Brooks’ proprietary control algorithm. Brooks’ new, improved metal seal valve provides better control because it is designed to be more forgiving to process changes.
Specifications:
| Max Pressure | Max Temp | ||||||
| Type | Full Scale Capacity | Accuracy | bar | psi | C | F | Input/Output |
| UHP Metal Seal Meter / Controller | 3 sccm – 30 slm | 1% Rate | 100 | 1500 | 65 | 150 | 0-5 Vdc, 4-20 mA or DeviceNet RS-485 |
